Products
WET ETCH & CLEAN
Chemical Filtration / Chemical Delivery System
All Teflon® Filter - Aggressive & High Temperature Applications FluoroFloTM -II AT / ATX / AT2 / AT3*
Features: All PTFE membrane with PFA support
Benefits: Broad chemical compatibility, PreWet version available, High flow, Long lifetime, Low pressure drop
Additional Information: -
Options: Cartridge Filter 7nm, 10nm, 20nm, 30nm 0.05um, 0.1um
PVD Electro Copper Plating Filter
CoopaGard - II HPX
Features: Advanced nodes, hydrophilic PTFE membrane filter. Low or no absorptions of suppressor additives. Optional CoopaGard-HPX ECP main filter with PES membrane available*
Benefits: Broad chemical compatibility, High flow, Long lifetime, Low pressure drop
Additional Information: -
Options: Cartridge Filter 0.05um, 0.1um
ST-2xx Stripper Filter
BuffaEtchTM -III HP / HPX
Features: Highly asymmetric PES hydrophilic membrane with PP support
Benefits: Retention up to 10nm particles, High flow, Low pressure drop, Meets demand of 20nm technology node
Additional Information: -
Options: Cartridge Filter 0.05um, 30nm